NOISE AND SENSITIVITY IN POLYSILICON PIEZORESISTIVE CANTILEVERS

于晓梅, 江兴流, J. Thaysen, O. Hansen, A. Boisen

Yu Xiao-mei (于晓梅), Jiang Xing-liu (江兴流), J. Thaysen, O. Hansen, A. Boisen

中国物理B . 2001, (10): 918 -923 . DOI: 10.1088/1009-1963/10/10/307