THE ANNEALING EFFECT OF CRYSTAL 4H-SiC FILMS PREPARED BY PULSED LASER DEPOSITION
王玉霞, 温军, 汤业庆, 郭震, 汤洪高, 吴建新
THE ANNEALING EFFECT OF CRYSTAL 4H-SiC FILMS PREPARED BY PULSED LASER DEPOSITION
Wang Yu-xia (王玉霞), Wen Jun (温军), Tang Ye-qing (汤业庆), Guo Zhen (郭震), Tang Hong-gao (汤洪高), Wu Jian-xin (吴建新)
中国物理B
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1998, (8): 589
-597
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DOI: 10.1088/1004-423X/7/8/006