THE ANNEALING FEATURES OF Ta/Si MULTILAYER FILMS
卢江, 周贵恩, 张庶元, 贾云波, 李凡庆, 黄允兰, 谭舜, 石磊, 张裕恒
THE ANNEALING FEATURES OF Ta/Si MULTILAYER FILMS
LU JIANG (卢江), ZHOU GUI-EN (周贵恩), ZHANG SHU-YUAN (张庶元), JIA YUN-BO (贾云波), LI FAN-QING (李凡庆), HUANG YUN-LAN (黄允兰), TAN SHUN (谭舜), SHI LEI (石磊), ZHANG YU-HENG (张裕恒)
中国物理B
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1994, (7): 512
-518
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DOI: 10.1088/1004-423X/3/7/005