EXPERIMENTAL STUDY OF DIFFRACTIVE PROPERTIES OF WAVELENGTH-SIZED SINGLE GROOVE IN Si-Si <sub>3</sub>N <sub>4</sub> SUBSTRATE

吕惠宾, R.E.Burge, D.N.Qu, X.Yuan

EXPERIMENTAL STUDY OF DIFFRACTIVE PROPERTIES OF WAVELENGTH-SIZED SINGLE GROOVE IN Si-Si ₃N ₄ SUBSTRATE

Lü Hui-bin (吕惠宾), R.E.Burge, D.N.Qu, X.Yuan

中国物理B . 1994, (5): 337 -344 . DOI: 10.1088/1004-423X/3/5/003