FORMATION OF A BURIED LAYER OF ALUMINIUM NITRIDE BY HIGH DOSE N
2
+ IMPLANTATION INTO ALUMINIUM
林成鲁, P.L.F.HEMMENT, 李金华, 施左宇, Y.LI, J.A.KILNER
FORMATION OF A BURIED LAYER OF ALUMINIUM NITRIDE BY HIGH DOSE N
2
+ IMPLANTATION INTO ALUMINIUM
LIN CHENG-LU (林成鲁), P.L.F.HEMMENT, LI JIN-HUA (李金华), SHI ZUO-YU (施左宇), Y.LI, J.A.KILNER
中国物理B
.
1993, (5): 376
-385
.
DOI: 10.1088/1004-423X/2/5/006