A STUDY ON SECONDARY DEFECTS IN SELF-ION IMPLANTED Si
田人和
A STUDY ON SECONDARY DEFECTS IN SELF-ION IMPLANTED Si
TIAN REN-HE (田人和)
中国物理B . 1993, (11): 833 -840 .  DOI: 10.1088/1004-423X/2/11/005