中国物理B ›› 2022, Vol. 31 ›› Issue (12): 124208-124208.doi: 10.1088/1674-1056/ac89e0

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Sensitivity improvement of aluminum-based far-ultraviolet nearly guided-wave surface plasmon resonance sensor

Tianqi Li(李天琦)1, Shujing Chen(陈淑静)2,†, and Chengyou Lin(林承友)1,‡   

  1. 1 College of Mathematics and Physics, Beijing University of Chemical Technology, Beijing 100029, China;
    2 School of Materials Science and Technology, China University of Geosciences(Beijing), Beijing 100083, China
  • 收稿日期:2021-12-25 修回日期:2022-08-10 接受日期:2022-08-16 出版日期:2022-11-11 发布日期:2022-11-19
  • 通讯作者: Shujing Chen, Chengyou Lin E-mail:chenshujing@cugb.edu.cn;cylin@mail.buct.edu.cn
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61805007 and 11547241).

Sensitivity improvement of aluminum-based far-ultraviolet nearly guided-wave surface plasmon resonance sensor

Tianqi Li(李天琦)1, Shujing Chen(陈淑静)2,†, and Chengyou Lin(林承友)1,‡   

  1. 1 College of Mathematics and Physics, Beijing University of Chemical Technology, Beijing 100029, China;
    2 School of Materials Science and Technology, China University of Geosciences(Beijing), Beijing 100083, China
  • Received:2021-12-25 Revised:2022-08-10 Accepted:2022-08-16 Online:2022-11-11 Published:2022-11-19
  • Contact: Shujing Chen, Chengyou Lin E-mail:chenshujing@cugb.edu.cn;cylin@mail.buct.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 61805007 and 11547241).

摘要: An aluminum (Al) based nearly guided-wave surface plasmon resonance (NGWSPR) sensor is investigated in the far-ultraviolet (FUV) region. By simultaneously optimizing the thickness of Al and dielectric films, the sensitivity of the optimized Al-based FUV-NGWSPR sensor increases from 183°/RIU to 309°/RIU, and its figure of merit rises from 26.47 RIU-1 to 32.59 RIU-1 when the refractive index of dielectric increases from 2 to 5. Compared with a traditional FUV-SPR sensor without dielectric, the optimized FUV-NGWSPR sensor can realize simultaneous improvement of sensitivity and figure of merit. In addition, the FUV-NGWSPR sensor with realistic materials (diamond, Ta2O5, and GaN) is also investigated, and 137.84%, 52.70%, and 41.89% sensitivity improvements are achieved respectively. This work proposes a method for performance improvement of FUV-SPR sensors by exciting nearly guided-wave, and could be helpful for the high-performance SPR sensor in the short-wavelength region.

关键词: surface plasmon resonance sensor, far-ultraviolet, nearly guided-wave, sensitivity

Abstract: An aluminum (Al) based nearly guided-wave surface plasmon resonance (NGWSPR) sensor is investigated in the far-ultraviolet (FUV) region. By simultaneously optimizing the thickness of Al and dielectric films, the sensitivity of the optimized Al-based FUV-NGWSPR sensor increases from 183°/RIU to 309°/RIU, and its figure of merit rises from 26.47 RIU-1 to 32.59 RIU-1 when the refractive index of dielectric increases from 2 to 5. Compared with a traditional FUV-SPR sensor without dielectric, the optimized FUV-NGWSPR sensor can realize simultaneous improvement of sensitivity and figure of merit. In addition, the FUV-NGWSPR sensor with realistic materials (diamond, Ta2O5, and GaN) is also investigated, and 137.84%, 52.70%, and 41.89% sensitivity improvements are achieved respectively. This work proposes a method for performance improvement of FUV-SPR sensors by exciting nearly guided-wave, and could be helpful for the high-performance SPR sensor in the short-wavelength region.

Key words: surface plasmon resonance sensor, far-ultraviolet, nearly guided-wave, sensitivity

中图分类号:  (Sensors, gyros)

  • 42.81.Pa
78.20.-e (Optical properties of bulk materials and thin films) 07.60.-j (Optical instruments and equipment) 95.85.Mt (Ultraviolet (10-300 nm))