Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

doi:10.1088/1674-1056/ac4a64

中国物理B ›› 2022, Vol. 31 ›› Issue (7): 77802-077802.doi: 10.1088/1674-1056/ac4a64

Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

Shang-Qi Kuang(匡尚奇)^1,2,†, Bo-Chao Li(李博超)^1,2, Yi Wang(王依)³, Xue-Peng Gong(龚学鹏)^3,‡, and Jing-Quan Lin(林景全)^1,2,§

1 School of Science, Changchun University of Science and Technology, Changchun 130022, China;
2 Key Laboratory of Ultrafast and Extreme Ultraviolet Optics, Changchun University of Science and Technology, Changchun 130022, China;
3 State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

收稿日期:2021-09-06 修回日期:2021-09-06 接受日期:2022-01-12 出版日期:2022-06-09 发布日期:2022-06-09
通讯作者: Shang-Qi Kuang, Xue-Peng Gong, Jing-Quan Lin E-mail:ksq@cust.edu.cn;gongxuepeng120@foxmail.com;linjingquan@cust.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 62175018, 61905239, and 61974142) and Jilin Scientific and Technological Development Plan, China (Grant Nos. 20190201013JC and 20200401052GX).

Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

Shang-Qi Kuang(匡尚奇)^1,2,†, Bo-Chao Li(李博超)^1,2, Yi Wang(王依)³, Xue-Peng Gong(龚学鹏)^3,‡, and Jing-Quan Lin(林景全)^1,2,§

1 School of Science, Changchun University of Science and Technology, Changchun 130022, China;
2 Key Laboratory of Ultrafast and Extreme Ultraviolet Optics, Changchun University of Science and Technology, Changchun 130022, China;
3 State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

Received:2021-09-06 Revised:2021-09-06 Accepted:2022-01-12 Online:2022-06-09 Published:2022-06-09
Contact: Shang-Qi Kuang, Xue-Peng Gong, Jing-Quan Lin E-mail:ksq@cust.edu.cn;gongxuepeng120@foxmail.com;linjingquan@cust.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 62175018, 61905239, and 61974142) and Jilin Scientific and Technological Development Plan, China (Grant Nos. 20190201013JC and 20200401052GX).

摘要/Abstract

摘要： With the purpose of designing the extreme ultraviolet polarizer with many objectives, a combined application of multi-objective genetic algorithms is theoretically proposed. Owing to the multi-objective genetic algorithm, the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space, and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction. Compared with the conventional method of multilayer design, our method has a higher probability of achieving the optimal multilayer design. Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space, and our results demonstrate a potential application of our method in the designs of optical thin films.

关键词: extreme ultraviolet polarizer, multilayer design, multi-objective genetic algorithm

Abstract: With the purpose of designing the extreme ultraviolet polarizer with many objectives, a combined application of multi-objective genetic algorithms is theoretically proposed. Owing to the multi-objective genetic algorithm, the relationships between different designing objectives of extreme ultraviolet polarizer have been obtained by analyzing the distribution of nondominated solutions in the four-dimensional objective space, and the optimized multilayer design can be obtained by guiding the searching in the desired region based on the multi-objective genetic algorithm with reference direction. Compared with the conventional method of multilayer design, our method has a higher probability of achieving the optimal multilayer design. Our work should be the first research in optimizing the optical multilayer designs in the high-dimensional objective space, and our results demonstrate a potential application of our method in the designs of optical thin films.

Key words: extreme ultraviolet polarizer, multilayer design, multi-objective genetic algorithm

中图分类号: (Multilayers; superlattices; photonic structures; metamaterials)

78.67.Pt

41.50.+h (X-ray beams and x-ray optics) 42.79.Ci (Filters, zone plates, and polarizers)

Shang-Qi Kuang(匡尚奇), Bo-Chao Li(李博超), Yi Wang(王依), Xue-Peng Gong(龚学鹏), and Jing-Quan Lin(林景全). Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space[J]. 中国物理B, 2022, 31(7): 77802-077802.

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Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

Design optimization of broadband extreme ultraviolet polarizer in high-dimensional objective space

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