Integrated silicon-based suspended racetrack micro-resonator for biological solution sensing with high-order mode

doi:10.1088/1674-1056/abf106

中国物理B ›› 2021, Vol. 30 ›› Issue (11): 114208-114208.doi: 10.1088/1674-1056/abf106

Integrated silicon-based suspended racetrack micro-resonator for biological solution sensing with high-order mode

Tao Ma(马涛)^1,2,†, Yong-Sheng Tian(田永生)¹, Shao-Hui Liu(刘少晖)¹, Jia-He Ma(马家赫)¹, Heng Liu(刘恒)^1,3, and Fang Wang(王芳)^1,2

1 College of Electronic and Electrical Engineering, Henan Normal University, Xinxiang 453007, China;
2 Henan Key Laboratory of Optoelectronic Sensing Integrated Application, Xinxiang 453007, China;
3 Academician Workstation of Electromagnetic Wave Engineering of Henan Province, Xinxiang 453007, China

收稿日期:2021-01-18 修回日期:2021-03-19 接受日期:2021-03-23 出版日期:2021-10-13 发布日期:2021-10-27
通讯作者: Tao Ma E-mail:matao@htu.edu.cn
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 62075057) and Ph. D. Program of Henan Normal University, China (Grant Nos. 5101239170010 and gd17167).

Integrated silicon-based suspended racetrack micro-resonator for biological solution sensing with high-order mode

Tao Ma(马涛)^1,2,†, Yong-Sheng Tian(田永生)¹, Shao-Hui Liu(刘少晖)¹, Jia-He Ma(马家赫)¹, Heng Liu(刘恒)^1,3, and Fang Wang(王芳)^1,2

1 College of Electronic and Electrical Engineering, Henan Normal University, Xinxiang 453007, China;
2 Henan Key Laboratory of Optoelectronic Sensing Integrated Application, Xinxiang 453007, China;
3 Academician Workstation of Electromagnetic Wave Engineering of Henan Province, Xinxiang 453007, China

Received:2021-01-18 Revised:2021-03-19 Accepted:2021-03-23 Online:2021-10-13 Published:2021-10-27
Contact: Tao Ma E-mail:matao@htu.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 62075057) and Ph. D. Program of Henan Normal University, China (Grant Nos. 5101239170010 and gd17167).

摘要/Abstract

摘要： A biological sensing structure with a high-order mode ($\mathrm{E}_{21}^{y}$) is designed, which is composed of a suspended racetrack micro-resonator (SRTMR) and a microfluidic channel. The mode characteristics, coupling properties, and sensing performances are simulated by using the finite element method (FEM). To analyze the mode confinement property, the confinement factors in the core and cladding of the suspended waveguide for the $\mathrm{E}_{11}^{x}$, $\mathrm{E}_{11}^{y}$, and $\mathrm{E}_{21}^{y}$ are calculated. The simulation results show that the refractive index (RI) sensitivity of the proposed sensing structure can be improved by using the high-order mode ($\mathrm{E}_{21}^{y}$). The RI sensitivity for the $\mathrm{E}_{21}^{y}$ mode is ～ 201 nm/RIU, which is twice to thrice higher than those for the $\mathrm{E}_{11}^{x}$ mode and the $\mathrm{E}_{11}^{y}$ mode. Considering a commercial spectrometer, the proposed sensing structure based on the SRTMR achieves a limit of detection (LOD) of ～ 4.7×10^-6 RIU. Combined with the microfluidic channel, the SRTMR can possess wide applications in the clinical diagnostic assays and biochemical detections.

关键词: micro-resonator, suspended racetrack, biological sensor, limit of detection

Abstract: A biological sensing structure with a high-order mode ($\mathrm{E}_{21}^{y}$) is designed, which is composed of a suspended racetrack micro-resonator (SRTMR) and a microfluidic channel. The mode characteristics, coupling properties, and sensing performances are simulated by using the finite element method (FEM). To analyze the mode confinement property, the confinement factors in the core and cladding of the suspended waveguide for the $\mathrm{E}_{11}^{x}$, $\mathrm{E}_{11}^{y}$, and $\mathrm{E}_{21}^{y}$ are calculated. The simulation results show that the refractive index (RI) sensitivity of the proposed sensing structure can be improved by using the high-order mode ($\mathrm{E}_{21}^{y}$). The RI sensitivity for the $\mathrm{E}_{21}^{y}$ mode is ～ 201 nm/RIU, which is twice to thrice higher than those for the $\mathrm{E}_{11}^{x}$ mode and the $\mathrm{E}_{11}^{y}$ mode. Considering a commercial spectrometer, the proposed sensing structure based on the SRTMR achieves a limit of detection (LOD) of ～ 4.7×10^-6 RIU. Combined with the microfluidic channel, the SRTMR can possess wide applications in the clinical diagnostic assays and biochemical detections.

Key words: micro-resonator, suspended racetrack, biological sensor, limit of detection

中图分类号: (Integrated optics)

42.82.-m

42.79.Gn (Optical waveguides and couplers) 87.85.fk (Biosensors) 07.07.Df (Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing)

Tao Ma(马涛), Yong-Sheng Tian(田永生), Shao-Hui Liu(刘少晖), Jia-He Ma(马家赫), Heng Liu(刘恒), and Fang Wang(王芳). Integrated silicon-based suspended racetrack micro-resonator for biological solution sensing with high-order mode[J]. 中国物理B, 2021, 30(11): 114208-114208.

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Integrated silicon-based suspended racetrack micro-resonator for biological solution sensing with high-order mode

Integrated silicon-based suspended racetrack micro-resonator for biological solution sensing with high-order mode

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