Optimized design and fabrication of nanosecond response electro–optic switch based on ultraviolet-curable polymers

doi:10.1088/1674-1056/24/4/044101

›› 2015, Vol. 24 ›› Issue (4): 44101-044101.doi: 10.1088/1674-1056/24/4/044101

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇下一篇

Optimized design and fabrication of nanosecond response electro–optic switch based on ultraviolet-curable polymers

赵旭亮^{a b}, 岳远斌^{a b}, 刘通^{a b}, 孙健^{a b}, 王希斌^{a b c}, 孙小强^{a b c}, 陈长鸣^{a b c}, 张大明^{a b c}

a College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;
b State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012, China;
c Jilin Provincial Engineering Laboratory on Polymer Planar Lightwave Circuit, Changchun 130012, China

收稿日期:2014-08-11 修回日期:2014-09-15 出版日期:2015-04-05 发布日期:2015-04-05
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61177027, 61107019, 61205032, and 61261130586).

Optimized design and fabrication of nanosecond response electro–optic switch based on ultraviolet-curable polymers

Zhao Xu-Liang (赵旭亮)^{a b}, Yue Yuan-Bin (岳远斌)^{a b}, Liu Tong (刘通)^{a b}, Sun Jian (孙健)^{a b}, Wang Xi-Bin (王希斌)^{a b c}, Sun Xiao-Qiang (孙小强)^{a b c}, Chen Chang-Ming (陈长鸣)^{a b c}, Zhang Da-Ming (张大明)^{a b c}

a College of Electronic Science and Engineering, Jilin University, Changchun 130012, China;
b State Key Laboratory on Integrated Optoelectronics, Jilin University, Changchun 130012, China;
c Jilin Provincial Engineering Laboratory on Polymer Planar Lightwave Circuit, Changchun 130012, China

Received:2014-08-11 Revised:2014-09-15 Online:2015-04-05 Published:2015-04-05
Contact: Sun Xiao-Qiang E-mail:sunxq@jlu.edu.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61177027, 61107019, 61205032, and 61261130586).

摘要/Abstract

摘要： A nanosecond response waveguide electro-optic (EO) switch based on ultraviolet (UV) sensitive polymers of Norland optical adhesive (NOA73) and Dispersed Red 1 (DR1) doped SU-8 (DR1/SU-8) is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave-guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch.

关键词: electro-optic switch, optical transmission loss, inverted-rib waveguide, poled polymers

Abstract: A nanosecond response waveguide electro-optic (EO) switch based on ultraviolet (UV) sensitive polymers of Norland optical adhesive (NOA73) and Dispersed Red 1 (DR1) doped SU-8 (DR1/SU-8) is designed and fabricated. The absorption properties, refractive indexes, and surface morphologies of NOA73 film are characterized. The single-mode transmission condition is computed by the effective index method, and the percentage of optical field distributed in EO layer is optimized to be 93.78 %. By means of spin-coating, thermal evaporation, photolithography, and inductively coupled plasma etching, a Mach-Zehnder inverted-rib waveguide EO switch with micro-strip line electrode is fabricated on a silicon substrate. Scanning electron microscope characterization proves the physic-chemical compatibility between NOA73 cladding and DR1/SU-8 core material. The optical transmission loss of the fabricated switch is measured to be 2.5 dB/cm. The rise time and fall time of switching are 3.199 ns and 2.559 ns, respectively. These results indicate that the inverted-rib wave-guide based on UV-curable polymers can effectively reduce the optical transmission loss and improve the time response performance of an EO switch.

Key words: electro-optic switch, optical transmission loss, inverted-rib waveguide, poled polymers

中图分类号: (Applied classical electromagnetism)

41.20.-q

42.25.-p (Wave optics) 42.65.-k (Nonlinear optics)

赵旭亮, 岳远斌, 刘通, 孙健, 王希斌, 孙小强, 陈长鸣, 张大明. Optimized design and fabrication of nanosecond response electro–optic switch based on ultraviolet-curable polymers[J]. , 2015, 24(4): 44101-044101.

Zhao Xu-Liang (赵旭亮), Yue Yuan-Bin (岳远斌), Liu Tong (刘通), Sun Jian (孙健), Wang Xi-Bin (王希斌), Sun Xiao-Qiang (孙小强), Chen Chang-Ming (陈长鸣), Zhang Da-Ming (张大明). Optimized design and fabrication of nanosecond response electro–optic switch based on ultraviolet-curable polymers[J]. Chin. Phys. B, 2015, 24(4): 44101-044101.

参考文献 49

[1]	Zhang X Y, Lee B, Lin C Y, Wang A X, Hosseini A and Chen R T 2012 IEEE Photon. J. 4 2214
[2]	Enami Y, Mathine D, DeRose C T, Norwood R A, Luo J, Jen A K Y and Peyghambarian N 2009 Appl. Phys. Lett. 94 213513
[3]	Zhang X Y, Hosseini A, Lin X H, Subbaraman H and Chen R T 2013 IEEE J. Sel. Top. Quantum Electron. 19 3401115
[4]	Li J Y, Lu D F and Qiu Z M 2014 Acta Phys. Sin. 63 077801 (in Chinese)
[5]	Wen Y, Zhang X X, Huang C Y and Shen J 2011 Acta Phys. Sin. 60 104223 (in Chinese)
[6]	Noguchi K, Mitomi O, Kawano K and Yanagibashi M 1993 IEEE Photon. Tech. Lett. 5 52
[7]	Enami Y, Derose C T, Mathine D, Loychik C, Greenlee C, Norwood R A, Kim T D, Luo J, Tian Y, Jen A K Y and Peyghambarian N 2007 Nat. Photon. 1 180
[8]	Sun J, Zhu G H, Sun X Q, Li T,Gao W N, Zhang D M and Hou A L 2009 Chin. Phys. Lett. 26 024206
[9]	Chen C M, Zhang F, Wang H, Sun X Q, Wang F, Cui Z C and Zhang D M 2011 IEEE J. Quantum. Electron. 47 959
[10]	Chen J J, Li Z, Zhang J S and Gong Q H 2008 Acta Phys. Sin. 57 5893 (in Chinese)
[11]	Lin C Y, Wang A X, Zhang X Y, Lee B S and Chen R T 2012 Proc. SPIE 8258 82580Y
[12]	Dalton L R, Lao D, Olbricht B C, Benight S, Bale D H, Davies J A, Ewy T, Hammond S R and Sullivan P A 2010 Opt. Mater. 32 658
[13]	Dalton L R 2011 Polymers 3 1325
[14]	Dalton L R Sullivan P A and Bale D H 2010 Chem. Rev. 110 22
[15]	Dalton L R 2009 Thin Solid Films 518 428
[16]	Tian H, Sun W M and Zhang Y D 2013 Acta Phys. Sin. 62 194204 (in Chinese)
[17]	Tian H, Zhang Y D, Wang H, Qiu W, Wang N and Yuan P 2008 Acta Phys. Sin. 57 6400 (in Chinese)
[18]	Li Y M and Chen B W 2013 Chin. Phys. B 22 124209
[19]	Zhang D L, Wu C and Pun E Y B 2010 Chin. Phys. B 19 024214
[20]	Pan P, An J M, Wang H J, Wang Y, Zhang J S, Wang L L, Dai H Q, Zhang X G, Wu Y D and Hu X W 2014 Chin. Phys. B 23 044210
[21]	Soref R A, Schmidtchen J amd Petermann K 1991 IEEE J. Quantum Electron. 27 1971
[22]	Pogossian S P, Vescan L and Vonsovici A 1998 IEEE J. Lightwave Technol. 16 1851
[23]	Ma H, Jen A K Y and Dalton L R 2002 Adv. Mater. 14 1339
[24]	Zhang X Y, Zhang T, Xue X J, Cui Y P and Wu P Q 2009 J. Opt. A 11 085411
[25]	Xu H, Li X Y, Xiao X, Li Z Y, Yu Y D and Yu J Z 2013 Chin. Phys. B 22 114212
[26]	Xu X J, Chen S W, Xu H H, Sun Y, Yu Y D, Yu J Z and Wang Q M 2009 Chin. Phys. B 18 3900
[27]	Cao T T, Zhang L B, Fei Y H, Cao Y M, Lei X and Chen S W 2013 Acta Phys. Sin. 62 194210 (in Chinese)
[28]	Yang B, Yang L, Hu R, Sheng Z, Dai D X, Liu Q K and He S L 2009 IEEE J. Lightwave Technol. 27 4091
[29]	Chen C M, Sun X Q, Zhang D, Shan Z B, Shin S Y and Zhang D M 2009 Opt. Laser Technol. 41 495
[30]	Shao G, Qiu W and Wang W 2010 Microsyst. Technol. 16 1471
[31]	Perentos N, Kostovski G and Mitchell A 2005 IEEE Photon. Tech. Lett. 17 2595
[32]	Fischbeck G, Moosburger R, Topper M and Petermann K 1996 Electron. Lett. 32 212
[33]	Yamada H, Chu T, Ishida S and Arakawa Y 2006 IEEE J. Sel. Top. Quantum Electron. 12 1371
[34]	Ma C S, Wang X Y, Zhang H M, Zhang D M, Cui Z C and Liu S Y 2004 Opt. Quantum Electron. 36 759
[35]	Zhao Y, Zhang D M, Wang F, Cui Z C, Yi M B, Ma C S, Guo W B and Liu S Y 2004 Opt. Laser Technol. 36 657
[36]	Sun X Q, Li X D, Chen C M, Zhang K, Meng J, Wang X B, Yang T F, Zhang D M, Wang F and Xie Z Y 2012 Thin Solid Films 520 5946
[37]	Yun B F, Hu G H, Lu C G and Cui Y P 2009 Opt. Commun. 282 1793
[38]	McKenna M, Lin E S, Mickelson A R, Dinu A R and Dan J 2007 J. Opt. Soc. Am. B: Opt. Phys. 24 2888
[39]	Pliška T, Meier J, Eckau A, Ricci V, Duff A C L, Canva M, Stegeman G I, Raymond P, Kajzar F and Chan K P 2000 Appl. Phys. Lett. 76 265
[40]	Li Y M and Cheng B W 2013 Chin Phys. B 22 124209
[41]	Zhang X, Li Z Q and Tong K 2014 Acta Phys. Sin. 63 094207 (in Chinese)
[42]	Salinas I, Garcés I, Alonso R, Pelayo J and Villuendas F 2005 Opt. Exress 13 564
[43]	Li H H, Chen J A and Wang Q K 2010 Chin Phys. B 19 114203
[44]	William M Diffey, Rebecca H Trimm, Mark G Temmen and Paul R Ashley 2005 J. Lightwave Technol. 23 1787
[45]	Sun L Y, Gao Z Y, Zou D S, Zhang L M, Li T L and Shen G D 2012 Acta Phys. Sin. 61 206801 (in Chinese)
[46]	Bora H, Haeng H A, Se H J, Jiyeon Y, Sang Y K, Sun Y P, Sun J K and Yong K K 2014 Macromol. Res. 22 678
[47]	Zheng C T, Ma C S, Yan X, Wan X Y and Zhang D M 2009 Opt. Eng. 48 054601
[48]	Seo B J, Kim S K, H Fetterman, W Steier, Jin D and Raluca Dinu 2008 J. Phys. Chem. C 112 7953
[49]	B Bortnik, Y C Hung, H Tazawa, Seo B J, Luo J D, Alex K. Y. Jen, William H Steier and Harold R Fetterman 2007 IEEE J. Sel. Top. Quantum Electron. 13 104

Optimized design and fabrication of nanosecond response electro–optic switch based on ultraviolet-curable polymers

Optimized design and fabrication of nanosecond response electro–optic switch based on ultraviolet-curable polymers

RichHTML

PDF (PC)

赞

可视化

摘要/Abstract

引用本文

使用本文

参考文献 49

相关文章 3

Metrics

本文评价

推荐阅读 0

[1]	张学娇, 叶青, 瞿荣辉, 蔡海文. High-power electro-optic switch technology based on novel transparent ceramic[J]. 中国物理B, 2016, 25(3): 34202-034202.
[2]	周培基, 邢界江, 李显尧, 李智勇, 余金中, 俞育德. Strictly non-blocking 4× 4 silicon electro-optic switch matrix[J]. 中国物理B, 2015, 24(12): 124209-124209.
[3]	徐学俊, 陈少武, 徐海华, 孙阳, 俞育德, 余金中, 王启明. High-speed 2×2 silicon-based electro-optic switch with nanosecond switch time[J]. 中国物理B, 2009, 18(9): 3900-3904.