中国物理B ›› 2014, Vol. 23 ›› Issue (4): 44302-044302.doi: 10.1088/1674-1056/23/4/044302

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇    下一篇

Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

吴少华a, 杜利东a, 孔德义c, 平皓月a b, 方震a, 赵湛a   

  1. a State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;
    b University of Chinese Academy of Sciences, Beijing 100049, China;
    c State Key Laboratory of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China
  • 收稿日期:2013-06-11 修回日期:2013-09-05 出版日期:2014-04-15 发布日期:2014-04-15
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant No. 51305423) and the National Basic Research Program of China (Grant No. 2011CB302104).

Hybrid device for acoustic noise reduction and energy harvesting based on a silicon micro-perforated panel structure

Wu Shao-Hua (吴少华)a, Du Li-Dong (杜利东)a, Kong De-Yi (孔德义)c, Ping Hao-Yue (平皓月)a b, Fang Zhen (方震)a, Zhao Zhan (赵湛)a   

  1. a State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China;
    b University of Chinese Academy of Sciences, Beijing 100049, China;
    c State Key Laboratory of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences, Hefei 230031, China
  • Received:2013-06-11 Revised:2013-09-05 Online:2014-04-15 Published:2014-04-15
  • Contact: Zhao Zhan E-mail:cpl_sci@163.com
  • About author:43.50.-x; 88.05.De
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant No. 51305423) and the National Basic Research Program of China (Grant No. 2011CB302104).

摘要: A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro-perforated panel (MPP) resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems (MEMS) technology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezoelectric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41 mV.

关键词: hybrid device, noise energy harvesting, acoustic noise reduction, silicon micro-perforated panel

Abstract: A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro-perforated panel (MPP) resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems (MEMS) technology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezoelectric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41 mV.

Key words: hybrid device, noise energy harvesting, acoustic noise reduction, silicon micro-perforated panel

中图分类号:  (Noise: its effects and control)

  • 43.50.-x
88.05.De (Thermodynamic constraints on energy production)