中国物理B ›› 2014, Vol. 23 ›› Issue (4): 44302-044302.doi: 10.1088/1674-1056/23/4/044302
• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇 下一篇
吴少华a, 杜利东a, 孔德义c, 平皓月a b, 方震a, 赵湛a
Wu Shao-Hua (吴少华)a, Du Li-Dong (杜利东)a, Kong De-Yi (孔德义)c, Ping Hao-Yue (平皓月)a b, Fang Zhen (方震)a, Zhao Zhan (赵湛)a
摘要: A kind of hybrid device for acoustic noise reduction and vibration energy harvesting based on the silicon micro-perforated panel (MPP) resonant structure is investigated in the article. The critical parts of the device include MPP and energy harvesting membranes. They are all fabricated by means of silicon micro-electro-mechanical systems (MEMS) technology. The silicon MPP has dense and accurate micro-holes. This noise reduction structure has the advantages of wide band and higher absorption coefficients. The vibration energy harvesting part is formed by square piezoelectric membranes arranged in rows. ZnO material is used as it has a good compatibility with the fabrication process. The MPP, piezoelectric membranes, and metal bracket are assembled into a hybrid device with multifunctions. The device exhibits good performances of acoustic noise absorption and acoustic-electric conversion. Its maximum open circuit voltage achieves 69.41 mV.
中图分类号: (Noise: its effects and control)