中国物理B ›› 2014, Vol. 23 ›› Issue (3): 35204-035204.doi: 10.1088/1674-1056/23/3/035204

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

On the energy conservation electrostatic particle-in-cell/Monte Carlo simulation:Benchmark and application to the radio frequency discharges

王虹宇a, 姜巍b, 孙鹏a, 孔令宝c   

  1. a School of Physics Science and Technology, Anshan Normal University, Anshan 114005, China;
    b School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China;
    c School of Science & Beijing Key Laboratory of Environmentally Harmful Chemicals Assessment, Beijing University of Chemical Technology, Beijing 100029, China
  • 收稿日期:2013-05-20 修回日期:2013-07-12 出版日期:2014-03-15 发布日期:2014-03-15
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 11275007, 11105057, 11175023, and 11275039) and the Program for Liaoning Excellent Talents in University, China (Grant No. LJQ2012098).

On the energy conservation electrostatic particle-in-cell/Monte Carlo simulation:Benchmark and application to the radio frequency discharges

Wang Hong-Yu (王虹宇)a, Jiang Wei (姜巍)b, Sun Peng (孙鹏)a, Kong Ling-Bao (孔令宝)c   

  1. a School of Physics Science and Technology, Anshan Normal University, Anshan 114005, China;
    b School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China;
    c School of Science & Beijing Key Laboratory of Environmentally Harmful Chemicals Assessment, Beijing University of Chemical Technology, Beijing 100029, China
  • Received:2013-05-20 Revised:2013-07-12 Online:2014-03-15 Published:2014-03-15
  • Contact: Sun Peng E-mail:sunpeng169@126.com
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 11275007, 11105057, 11175023, and 11275039) and the Program for Liaoning Excellent Talents in University, China (Grant No. LJQ2012098).

摘要: We benchmark and analyze the error of energy conservation (EC) scheme in particle-in-cell/Monte Carlo (PIC/MC) algorithms by simulating the radio frequency discharge. The plasma heating behaviors and electron distributing functions obtained by one-dimensional (1D) simulation are analyzed. Both explicit and implicit algorithms are checked. The results showed that the EC scheme can eliminated the self-heating with wide grid spacing in both cases with a small reduction of the accuracies. In typical parameters, the EC implicit scheme has higher precision than EC explicit scheme. Some “numerical cooling” behaviors are observed and analyzed. Some other errors are also analyzed. The analysis showed that the EC implicit scheme can be used to qualitative estimation of some discharge problems with much less computational resource cost without much loss of accuracies.

关键词: particle-in-cell/Monte Carlo simulation, energy conservation, grid heating, discharging simulation

Abstract: We benchmark and analyze the error of energy conservation (EC) scheme in particle-in-cell/Monte Carlo (PIC/MC) algorithms by simulating the radio frequency discharge. The plasma heating behaviors and electron distributing functions obtained by one-dimensional (1D) simulation are analyzed. Both explicit and implicit algorithms are checked. The results showed that the EC scheme can eliminated the self-heating with wide grid spacing in both cases with a small reduction of the accuracies. In typical parameters, the EC implicit scheme has higher precision than EC explicit scheme. Some “numerical cooling” behaviors are observed and analyzed. Some other errors are also analyzed. The analysis showed that the EC implicit scheme can be used to qualitative estimation of some discharge problems with much less computational resource cost without much loss of accuracies.

Key words: particle-in-cell/Monte Carlo simulation, energy conservation, grid heating, discharging simulation

中图分类号:  (High-frequency and RF discharges)

  • 52.80.Pi
52.27.Aj (Single-component, electron-positive-ion plasmas) 52.65.Rr (Particle-in-cell method)