中国物理B ›› 2014, Vol. 23 ›› Issue (1): 17804-017804.doi: 10.1088/1674-1056/23/1/017804
• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇 下一篇
谷宇, 李强, 许保军, 赵喆
Gu Yu (谷宇), Li Qiang (李强), Xu Bao-Jun (许保军), Zhao Zhe (赵喆)
摘要: We present a new polymer quartz piezoelectric crystal sensor that takes a quartz piezoelectric crystal as the basal material and a nanometer nonmetallic polymer thin film as the surface coating based on the principle of quartz crystal microbalance (QCM). The new sensor can be used to detect the characteristic materials of a volatile liquid. A mechanical model of the new sensor was built, whose structure was a thin circle plate composing of polytef/quartz piezoelectric/polytef. The mechanical model had a diameter of 8 mm and a thickness of 170 μ. The vibration state of the model was simulated by software ANSYS after the physical parameters and the boundary condition of the new sensor were set. According to the results of experiments, we set up a frequency range from 9.995850 MHz to 9.997225 MHz, 17 kinds of frequencies and modes of vibration were obtained within this range. We found a special frequency fsp of 9.996358 MHz. When the resonant frequency of the new sensor’s mechanical model reached the special frequency, a special phenomenon occurred. In this case, the amplitude of the center point O on the mechanical model reached the maximum value. At the same time, the minimum absolute difference between the simulated frequency based on the ANSYS software and the experimental measured stable frequency was reached. The research showed that the design of the new polymer quartz piezoelectric crystal sensor perfectly conforms to the principle of QCM. A special frequency value fsp was found and subsequently became one of the most important parameters in the new sensor design.
中图分类号: (Theory, models, and numerical simulation)