中国物理B ›› 2013, Vol. 22 ›› Issue (11): 115205-115205.doi: 10.1088/1674-1056/22/11/115205

• PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES • 上一篇    下一篇

Changes of the electron dynamics in hydrogen inductively coupled plasma

高飞, 刘巍, 赵书霞, 张钰如, 孙长森, 王友年   

  1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China
  • 收稿日期:2013-03-12 修回日期:2013-05-09 出版日期:2013-09-28 发布日期:2013-09-28
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 11075029, 11175034, and 11205025) and the Fundamental Research Funds for Central Universities, China (Grant No. DUT12RC(3)14).

Changes of the electron dynamics in hydrogen inductively coupled plasma

Gao Fei (高飞), Liu Wei (刘巍), Zhao Shu-Xia (赵书霞), Zhang Yu-Ru (张钰如), Sun Chang-Sen (孙长森), Wang You-Nian (王友年)   

  1. School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China
  • Received:2013-03-12 Revised:2013-05-09 Online:2013-09-28 Published:2013-09-28
  • Contact: Wang You-Nian E-mail:ynwang@dlut.edu.cn
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 11075029, 11175034, and 11205025) and the Fundamental Research Funds for Central Universities, China (Grant No. DUT12RC(3)14).

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摘要： Changes of the electron dynamics in hydrogen (H2) radio-frequency (RF) inductively coupled plasmas are investigated using a hairpin probe and an intensified charged coupled device (ICCD). The electron density, plasma emission intensity, and input current (voltage) are measured during the E to H mode transitions at different pressures. It is found that the electron density, plasma emission intensity, and input current jump up discontinuously, and the input voltage jumps down at the E to H mode transition points. And the threshold power of the E to H mode transition decreases with the increase of the pressure. Moreover, space and phase resolved optical emission spectroscopic measurements reveal that, in the E mode, the RF dynamics is characterized by one dominant excitation per RF cycle, while in the H mode, there are two excitation maxima within one cycle.

关键词: mode transition, inductively coupled plasma, hairpin probe, hydrogen

Abstract: Changes of the electron dynamics in hydrogen (H2) radio-frequency (RF) inductively coupled plasmas are investigated using a hairpin probe and an intensified charged coupled device (ICCD). The electron density, plasma emission intensity, and input current (voltage) are measured during the E to H mode transitions at different pressures. It is found that the electron density, plasma emission intensity, and input current jump up discontinuously, and the input voltage jumps down at the E to H mode transition points. And the threshold power of the E to H mode transition decreases with the increase of the pressure. Moreover, space and phase resolved optical emission spectroscopic measurements reveal that, in the E mode, the RF dynamics is characterized by one dominant excitation per RF cycle, while in the H mode, there are two excitation maxima within one cycle.

Key words: mode transition, inductively coupled plasma, hairpin probe, hydrogen

中图分类号:  (Plasma diagnostic techniques and instrumentation)

  • 52.70.-m
52.80.Pi (High-frequency and RF discharges) 52.50.Qt (Plasma heating by radio-frequency fields; ICR, ICP, helicons)