Selection of isolated and individual single-walled carbon nanotube from a film and its usage in nanodevices

doi:10.1088/1674-1056/20/6/067305

中国物理B ›› 2011, Vol. 20 ›› Issue (6): 67305-067305.doi: 10.1088/1674-1056/20/6/067305

• CONDENSED MATTER: ELECTRONIC STRUCTURE, ELECTRICAL, MAGNETIC, AND OPTICAL PROPERTIES • 上一篇下一篇

Selection of isolated and individual single-walled carbon nanotube from a film and its usage in nanodevices

王公堂

College of Physics and Electronics, Shandong Normal University, Jinan 250014, China

收稿日期:2011-01-19 修回日期:2011-02-25 出版日期:2011-06-15 发布日期:2011-06-15
基金资助:
Project supported by the National Natural Science Foundation of China (Grant No. 90201025).

Selection of isolated and individual single-walled carbon nanotube from a film and its usage in nanodevices

Wang Gong-Tang(王公堂)^†

College of Physics and Electronics, Shandong Normal University, Jinan 250014, China

Received:2011-01-19 Revised:2011-02-25 Online:2011-06-15 Published:2011-06-15
Supported by:
Project supported by the National Natural Science Foundation of China (Grant No. 90201025).

摘要/Abstract

摘要： Individual and isolated single-walled carbon nanotubes (SWNTs) are important for fabricating relevant nanodevices and studying the properties of the SWNT devices. In this work, we demonstrate that individual and isolated SWNT can be selected and obtained from a film containing a huge number of SWNTs. By using both the polymethylmethacrylate (PMMA) as a negative resist and the electron beam lithography, the selected SWNT can be fixed on a substrate, while the other SWNTs in the film can lift off. The selected SWNT can be used to fabricate nanodevice and a gas sensor of oxygen is demonstrated in this work.

Abstract: Individual and isolated single-walled carbon nanotubes (SWNTs) are important for fabricating relevant nanodevices and studying the properties of the SWNT devices. In this work, we demonstrate that individual and isolated SWNT can be selected and obtained from a film containing a huge number of SWNTs. By using both the polymethylmethacrylate (PMMA) as a negative resist and the electron beam lithography, the selected SWNT can be fixed on a substrate, while the other SWNTs in the film can lift off. The selected SWNT can be used to fabricate nanodevice and a gas sensor of oxygen is demonstrated in this work.

Key words: single-walled carbon nanotube, electron beam lithography, sensor

中图分类号: (Nanotubes)

73.63.Fg

王公堂. Selection of isolated and individual single-walled carbon nanotube from a film and its usage in nanodevices[J]. 中国物理B, 2011, 20(6): 67305-067305.

Wang Gong-Tang(王公堂). Selection of isolated and individual single-walled carbon nanotube from a film and its usage in nanodevices[J]. Chin. Phys. B, 2011, 20(6): 67305-067305.

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Selection of isolated and individual single-walled carbon nanotube from a film and its usage in nanodevices

Selection of isolated and individual single-walled carbon nanotube from a film and its usage in nanodevices

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