中国物理B ›› 2010, Vol. 19 ›› Issue (12): 124214-124214.doi: 10.1088/1674-1056/19/12/124214

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A novel highly efficient grating coupler with large filling factor used for optoelectronic integration

樊中朝1, 韩伟华1, 周亮2, 李智勇2, 朱宇2, 李运涛2, 俞育德2, 余金中2   

  1. (1)Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (2)State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • 收稿日期:2010-05-09 修回日期:2010-06-02 出版日期:2010-12-15 发布日期:2010-12-15
  • 基金资助:
    Project supported in part by the National Natural Science Foundation of China (Grant No. 60877036), the National Basic Research Program of China (Grant No. 2006CB302803), the Foundation of the State Key Laboratory of Advanced Optical Communication Systems and Networks, China (Grant No. 2008SH02) and the Knowledge Innovation Program of Institute of Semiconductors, Chinese Academy of Sciences (Grant No. ISCAS2008T10).

A novel highly efficient grating coupler with large filling factor used for optoelectronic integration

Zhou Liang(周亮)a), Li Zhi-Yong(李智勇) a), and Zhu Yu(朱宇)a), Li Yun-Tao(李运涛)a), Fan Zhong-Cao(樊中朝)b), Han Wei-Hua(韩伟华)b), Yu Yu-De(俞育德)a), and Yu Jin-Zhong(余金中)a)†   

  1. a State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; b Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
  • Received:2010-05-09 Revised:2010-06-02 Online:2010-12-15 Published:2010-12-15
  • Supported by:
    Project supported in part by the National Natural Science Foundation of China (Grant No. 60877036), the National Basic Research Program of China (Grant No. 2006CB302803), the Foundation of the State Key Laboratory of Advanced Optical Communication Systems and Networks, China (Grant No. 2008SH02) and the Knowledge Innovation Program of Institute of Semiconductors, Chinese Academy of Sciences (Grant No. ISCAS2008T10).

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摘要： A novel highly efficient grating coupler with large filling factor and deep etching is proposed in silicon-on-insulator for near vertical coupling between the rib waveguide and optical fibre. The deep slots acting as high efficient scattering centres are analysed and optimized. As high as 60% coupling efficiency at telecom wavelength of 1550-nm and 3-dB bandwidth of 61 nm are predicted by simulation. A peak coupling efficiency of 42.1% at wavelength 1546-nm and 3-dB bandwidth of 37.6 nm are obtained experimentally.

Abstract: A novel highly efficient grating coupler with large filling factor and deep etching is proposed in silicon-on-insulator for near vertical coupling between the rib waveguide and optical fibre. The deep slots acting as high efficient scattering centres are analysed and optimized. As high as 60% coupling efficiency at telecom wavelength of 1550-nm and 3-dB bandwidth of 61 nm are predicted by simulation. A peak coupling efficiency of 42.1% at wavelength 1546-nm and 3-dB bandwidth of 37.6 nm are obtained experimentally.

Key words: silicon photonics, silicon-on-insulator, grating coupler

中图分类号:  (Gratings)

  • 42.79.Dj
42.82.Bq (Design and performance testing of integrated-optical systems) 42.82.Et (Waveguides, couplers, and arrays)