中国物理B ›› 2008, Vol. 17 ›› Issue (10): 3799-3806.doi: 10.1088/1674-1056/17/10/044

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High and low frequency relaxation oscillations in a capacitive discharge plasma

Sungjin Kim1, 周筑文2, 吉世印2, 孙光宇2, 邓明森2   

  1. (1)Department of Electrical Engineering and Computer Sciences - 1770 University of California, Berkeley CA 94720, U.S.A.; (2)Department of physics, Guizhou Educational College, Guiyang 550003, China
  • 收稿日期:2008-02-14 修回日期:2008-03-31 出版日期:2008-10-20 发布日期:2008-10-20
  • 基金资助:
    Project supported by the Science Foundation of the Educational Bureau of Guizhou Province in China (Grant No ECS-2006215), the Lam Research Corporation, the State of California MICRO Program, National Science Foundation (Grant No ECS-0139956), and a UC Discovery Grant from the Industry-University Cooperative Research Program (IUCRP).

High and low frequency relaxation oscillations in a capacitive discharge plasma

Zhou Zhu-Wen(周筑文)a)†, Sungjin Kimb), Ji Shi-Yin(吉世印)a), Sun Guang-Yu(孙光宇)a), and Deng Ming-Sen(邓明森)a)   

  1. a Department of physics, Guizhou Educational College, Guiyang 550003, China; b Department of Electrical Engineering and Computer Sciences - 1770 University of California, Berkeley CA 94720, U.S.A.
  • Received:2008-02-14 Revised:2008-03-31 Online:2008-10-20 Published:2008-10-20
  • Supported by:
    Project supported by the Science Foundation of the Educational Bureau of Guizhou Province in China (Grant No ECS-2006215), the Lam Research Corporation, the State of California MICRO Program, National Science Foundation (Grant No ECS-0139956), and a UC Discovery Grant from the Industry-University Cooperative Research Program (IUCRP).

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摘要： Both high and low frequency relaxation oscillations have been observed in an argon capacitive discharge connected to a peripheral grounded chamber through a slot with dielectric spacers. The oscillations, observed from time-varying optical emission of the main discharge chamber, show, for example, a high frequency (46\,kHz) relaxation oscillation at 100\,mTorr, with an absorbed power near the peripheral breakdown, and a low frequency (2.7--3.7\,Hz) oscillation, at a higher absorbed power. The high frequency oscillation is found to ignite a plasma in the slot, but usually not in the periphery. The high frequency oscillation is interpreted by using an electromagnetic model of the slot impedance, combined with the circuit analysis of the system including a matching network. The model is further developed by using a parallel connection of variable peripheral capacitance to analyse the low frequency oscillation. The results obtained from the model are in agreement with the experimental observations and indicate that a variety of behaviours are dependent on the matching conditions.

关键词: relaxation oscillation, capacitive discharge, periphery, slot

Abstract: Both high and low frequency relaxation oscillations have been observed in an argon capacitive discharge connected to a peripheral grounded chamber through a slot with dielectric spacers. The oscillations, observed from time-varying optical emission of the main discharge chamber, show, for example, a high frequency (46 kHz) relaxation oscillation at 100 mTorr, with an absorbed power near the peripheral breakdown, and a low frequency (2.7--3.7 Hz) oscillation, at a higher absorbed power. The high frequency oscillation is found to ignite a plasma in the slot, but usually not in the periphery. The high frequency oscillation is interpreted by using an electromagnetic model of the slot impedance, combined with the circuit analysis of the system including a matching network. The model is further developed by using a parallel connection of variable peripheral capacitance to analyse the low frequency oscillation. The results obtained from the model are in agreement with the experimental observations and indicate that a variety of behaviours are dependent on the matching conditions.

Key words: relaxation oscillation, capacitive discharge, periphery, slot

中图分类号:  (Electrostatic waves and oscillations (e.g., ion-acoustic waves))

  • 52.35.Fp
52.80.-s (Electric discharges) 52.25.Os (Emission, absorption, and scattering of electromagnetic radiation ?) 52.35.Py (Macroinstabilities (hydromagnetic, e.g., kink, fire-hose, mirror, ballooning, tearing, trapped-particle, flute, Rayleigh-Taylor, etc.))