中国物理B ›› 2001, Vol. 10 ›› Issue (7): 631-635.doi: 10.1088/1009-1963/10/7/309

• CLASSICAL AREAS OF PHENOMENOLOGY • 上一篇    下一篇

FABRICATION AND APPLICATION OF NEAR-FIELD OPTICAL FIBRE PROBE

孙家林1, 徐建华1, 田广彦1, 郭继华1, 赵钧1, 谢爱芳2, 张泽渤2   

  1. (1)Department of Physics, Molecular and Nano Sciences Laboratory of Education Ministry, Tsinghua University, Beijing 100084, China; (2)Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Science, Beijing 100080, China
  • 收稿日期:2000-11-15 修回日期:2001-03-13 出版日期:2005-06-12 发布日期:2005-06-12
  • 基金资助:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 19890380-7 and 69808003) and the Beijing Natural Sciences Foundation (Grant No. 2992018).

FABRICATION AND APPLICATION OF NEAR-FIELD OPTICAL FIBRE PROBE

Sun Jia-lin (孙家林)a, Xu Jian-hua (徐建华)a, Tian Guang-yan (田广彦)a, Guo Ji-hua (郭继华)a, Zhao Jun (赵钧)a, Xie Ai-fang (谢爱芳)b, Zhang Ze-bo (张泽渤)b   

  1. a Department of Physics, Molecular and Nano Sciences Laboratory of Education Ministry, Tsinghua University, Beijing 100084, China; b Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Science, Beijing 100080, China
  • Received:2000-11-15 Revised:2001-03-13 Online:2005-06-12 Published:2005-06-12
  • Supported by:
    Project supported by the National Natural Science Foundation of China (Grant Nos. 19890380-7 and 69808003) and the Beijing Natural Sciences Foundation (Grant No. 2992018).

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摘要： In this paper, the fabrication of a large cone angle near-field optical fibre probe, using the two-step chemical etching method and bent probe, is introduced, and the controlling parameters of the coated Cr－Al film at the probe tip are presented. The scanning electron microscopy images display that the tip diameter of the uncoated large cone angle fibre probe obtained is less than 50nm, the cone angle over 90°, and the diameter of light aperture at the coated probe tip is less than 100nm. The measured results of the optical transmission efficiency for various probe tips show that the uncoated straight optical fibre probe, film-coated straight probe and film-coated bent probe are 3×10-1, 2×10-3, and 1×10-4 times that of the flat fibre probe, respectively. In addition, the force images and near-field optical images of a standard sample are acquired using a large cone angle and film-coated bent probe.

Abstract: In this paper, the fabrication of a large cone angle near-field optical fibre probe, using the two-step chemical etching method and bent probe, is introduced, and the controlling parameters of the coated Cr－Al film at the probe tip are presented. The scanning electron microscopy images display that the tip diameter of the uncoated large cone angle fibre probe obtained is less than 50nm, the cone angle over 90°, and the diameter of light aperture at the coated probe tip is less than 100nm. The measured results of the optical transmission efficiency for various probe tips show that the uncoated straight optical fibre probe, film-coated straight probe and film-coated bent probe are 3×10-1, 2×10-3, and 1×10-4 times that of the flat fibre probe, respectively. In addition, the force images and near-field optical images of a standard sample are acquired using a large cone angle and film-coated bent probe.

Key words: two-step chemical etching, large cone angle, film-coated bent probe, optical transmission efficiency

中图分类号:  (Fabrication, cladding, and splicing)

  • 42.81.Bm
81.65.Cf (Surface cleaning, etching, patterning) 78.66.Bz (Metals and metallic alloys) 42.81.Cn (Fiber testing and measurement of fiber parameters) 42.30.-d (Imaging and optical processing) 42.79.Wc (Optical coatings)