A quartz-enhanced photoacoustic spectroscopy sensor for measurement of water vapor concentration in the air

doi:10.1088/1674-1056/24/1/014206

›› 2015, Vol. 24 ›› Issue (1): 14206-014206.doi: 10.1088/1674-1056/24/1/014206

• ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS • 上一篇下一篇

A quartz-enhanced photoacoustic spectroscopy sensor for measurement of water vapor concentration in the air

龚萍, 谢亮, 漆晓琼, 王瑞, 王辉, 常明超, 杨慧霞, 孙菲, 李冠鹏

State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

收稿日期:2014-05-12 修回日期:2014-08-07 出版日期:2015-01-05 发布日期:2015-01-05
基金资助:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61107070, 61127018, and 61377071).

A quartz-enhanced photoacoustic spectroscopy sensor for measurement of water vapor concentration in the air

Gong Ping (龚萍), Xie Liang (谢亮), Qi Xiao-Qiong (漆晓琼), Wang Rui (王瑞), Wang Hui (王辉), Chang Ming-Chao (常明超), Yang Hui-Xia (杨慧霞), Sun Fei (孙菲), Li Guan-Peng (李冠鹏)

State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Received:2014-05-12 Revised:2014-08-07 Online:2015-01-05 Published:2015-01-05
Contact: Xie Liang E-mail:xiel@semi.ac.cn
Supported by:
Project supported by the National Natural Science Foundation of China (Grant Nos. 61107070, 61127018, and 61377071).

摘要/Abstract

摘要： A compact and highly linear quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor for the measurement of water vapor concentration in the air is demonstrated. A cost-effective quartz tuning fork (QTF) is used as the sharp transducer to convert light energy into an electrical signal based on the piezoelectric effect, thereby removing the need for a photodetector. The short optical path featured by the proposed sensing system leads to a decreased size. Furthermore, a pair of microresonators is applied in the absorbance detection module (ADM) for QTF signal enhancement. Compared with the system without microresonators, the detected QTF signal is increased to approximately 7-fold. Using this optimized QEPAS sensor with the proper modulation frequency and depth, we measure the water vapor concentration in the air at atmospheric pressure and room temperature. The experimental result shows that the sensor has a high sensitivity of 1.058 parts-per-million.

关键词: distributed feedback laser diode, photoacoustic spectroscopy, wavelength modulation, second harmonic detection

Abstract: A compact and highly linear quartz-enhanced photoacoustic spectroscopy (QEPAS) sensor for the measurement of water vapor concentration in the air is demonstrated. A cost-effective quartz tuning fork (QTF) is used as the sharp transducer to convert light energy into an electrical signal based on the piezoelectric effect, thereby removing the need for a photodetector. The short optical path featured by the proposed sensing system leads to a decreased size. Furthermore, a pair of microresonators is applied in the absorbance detection module (ADM) for QTF signal enhancement. Compared with the system without microresonators, the detected QTF signal is increased to approximately 7-fold. Using this optimized QEPAS sensor with the proper modulation frequency and depth, we measure the water vapor concentration in the air at atmospheric pressure and room temperature. The experimental result shows that the sensor has a high sensitivity of 1.058 parts-per-million.

Key words: distributed feedback laser diode, photoacoustic spectroscopy, wavelength modulation, second harmonic detection

中图分类号: (Laser optical systems: design and operation)

42.60.-v

78.20.Pa (Photoacoustic effects) 42.60.Fc (Modulation, tuning, and mode locking) 02.30.Px (Abstract harmonic analysis)

龚萍, 谢亮, 漆晓琼, 王瑞, 王辉, 常明超, 杨慧霞, 孙菲, 李冠鹏. A quartz-enhanced photoacoustic spectroscopy sensor for measurement of water vapor concentration in the air[J]. , 2015, 24(1): 14206-014206.

Gong Ping (龚萍), Xie Liang (谢亮), Qi Xiao-Qiong (漆晓琼), Wang Rui (王瑞), Wang Hui (王辉), Chang Ming-Chao (常明超), Yang Hui-Xia (杨慧霞), Sun Fei (孙菲), Li Guan-Peng (李冠鹏). A quartz-enhanced photoacoustic spectroscopy sensor for measurement of water vapor concentration in the air[J]. Chin. Phys. B, 2015, 24(1): 14206-014206.

参考文献 23

[1]	Zhang L, Gu F X, Lou J Y, Yin X F and Tong L M 2008 Opt. Express 16 13349
[2]	Higdon N S, Browell E V, Ponsardin P, Grossmann B E, Butler C F, Chyba T H, Mayo M N, Allen R J, Heuser A W and Grant W B 1994 Appl. Opt. 33 6422
[3]	Mathew J, Semenova Y and Farrell G 2013 Opt. Express 21 6313
[4]	Gu B, Yin M, Zhang A P, Qian J and He S 2011 Opt. Express 19 4140
[5]	Bhuyan M and Bhuyan R 1995 Industrial Automation and Control, 1995 IEEE/IAS International Conference on (Cat. No. 95TH8005), January 5-7, 1995 Hyderabad, India, p. 7
[6]	Silver J A and Stanton A C 1987 Appl. Opt. 26 2558
[7]	Chatterjee A, Munshi S, Dutta M and Rakshit A 2000 Instrumentation and Measurement Technology Conference, 2000. IMTC 2000. Proceedings of the 17th IEEE, May 1-4, 2000 Baltimore, USA, p. 313
[8]	Thoma P, Colla J and Stewart R 1979 Components, Hybrids, and Manufacturing Technology, IEEE Transactions on, September, 1979 p. 321
[9]	Bridgeman R C and Kraft P L 1969 Industrial Electronics and Control Instrumentation, IEEE Transactions on, July, 1969 p. 13
[10]	Fisher P D, Lillevik S L and Jones A L 1981 Instrumentation and Measurement, IEEE Transactions on, March, 1981 p. 57
[11]	Svensson T, Lewander M and Svanberg S 2010 Opt. Express 18 16460
[12]	Yang B, He G Q, Liu P J and Qi Z M 2011 Photonics and Optoelectronics (SOPO), 2011 Symposium on, May 16-18, 2011 Wuhan, China, p. 1
[13]	Cao Y, Jin W, Ho H, Qi L and Yang Y 2012 Appl. Phys. B 109 359
[14]	Kosterev A, Bakhirkin Y A, Curl R and Tittel F 2002 Opt. Lett. 27 1902
[15]	Jahjah M, Vicet A and Rouillard Y 2012 Appl. Phys. B 106 483
[16]	Dong L, Kosterev A A, Thomazy D and Tittel F K 2010 Appl. Phys. B 100 627
[17]	Kosterev A A, Tittel F K, Serebryakov D V, Malinovsky A L and Morozov I V 2005 Rev. Sci. Instrum. 76 043105
[18]	Che L, Ding Y J, Peng Z M and Li X H 2012 Chin. Phys. B 21 127803
[19]	Fuwa K and Valle B L 1963 Anal. Chem. 35 942
[20]	Wysocki G, Kosterev A A and Tittel F K 2006 Appl. Phys. B 85 301
[21]	Lei D, Spagnolo V, Lewicki and Tittel F K 2011 Opt. Express 19 24037
[22]	Kosterev A A, Buerki P R, Dong L, Reed M, Day T and Tittel F K 2010 Appl. Phys. B 100 173
[23]	Harvard Smithsonian Center for Astrophysics 2004 The HITRAN molecular spectroscopic database

A quartz-enhanced photoacoustic spectroscopy sensor for measurement of water vapor concentration in the air

A quartz-enhanced photoacoustic spectroscopy sensor for measurement of water vapor concentration in the air

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