CMOS compatible highly efficient grating couplers with a stair-step blaze profile

doi:10.1088/1674-1056/20/7/074212

中国物理B ›› 2011, Vol. 20 ›› Issue (7): 74212-074212.doi: 10.1088/1674-1056/20/7/074212

CMOS compatible highly efficient grating couplers with a stair-step blaze profile

樊中朝¹, 韩伟华¹, 周亮², 李智勇², 胡应涛², 熊康², 俞育德², 余金中²

(1)Engineering Research Center for Semiconductor Integrated Technology, Institute of semiconductors, Chinese Academy of Sciences, Beijing 100083, China; (2)State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China

收稿日期:2011-01-12 修回日期:2011-02-11 出版日期:2011-07-15 发布日期:2011-07-15

CMOS compatible highly efficient grating couplers with a stair-step blaze profile

Zhou Liang(周亮)^a), Li Zhi-Yong(李智勇)^a)^†, Hu Ying-Tao(胡应涛)^a), Xiong Kang(熊康)^a), Fan Zhong-Chao(樊中朝)^b), Han Wei-Hua(韩伟华)^b), Yu Yu-De (俞育德)^a), and Yu Jin-Zhong (余金中)^a)

^a State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China; ^b Engineering Research Center for Semiconductor Integrated Technology, Institute of semiconductors, Chinese Academy of Sciences, Beijing 100083, China

Received:2011-01-12 Revised:2011-02-11 Online:2011-07-15 Published:2011-07-15

摘要/Abstract

摘要： A novel grating coupler with a stair-step blaze profile is proposed. The coupler is a CMOS process compatible device and can be used for light coupling in optical communication. The blaze profile can be optimized to obtain a high efficiency of 66.7% for the out-of-plane coupling at the centre wavelength of 1595 nm with a 1 dB bandwidth of 41 nm. Five key parameters of the stair-step blaze grating and their effects on the coupling are discussed for the application in L band telecommunication.

关键词: grating coupler, blaze profile, integrated optics, silicon-on-insulator

Abstract: A novel grating coupler with a stair-step blaze profile is proposed. The coupler is a CMOS process compatible device and can be used for light coupling in optical communication. The blaze profile can be optimized to obtain a high efficiency of 66.7% for the out-of-plane coupling at the centre wavelength of 1595 nm with a 1 dB bandwidth of 41 nm. Five key parameters of the stair-step blaze grating and their effects on the coupling are discussed for the application in L band telecommunication.

Key words: grating coupler, blaze profile, integrated optics, silicon-on-insulator

中图分类号: (Optical computers, logic elements, interconnects, switches; neural networks)

42.79.Ta

42.79.Dj (Gratings) 42.81.Qb (Fiber waveguides, couplers, and arrays)

周亮, 李智勇, 胡应涛, 熊康, 樊中朝, 韩伟华, 俞育德, 余金中. CMOS compatible highly efficient grating couplers with a stair-step blaze profile[J]. 中国物理B, 2011, 20(7): 74212-074212.

Zhou Liang(周亮), Li Zhi-Yong(李智勇), Hu Ying-Tao(胡应涛), Xiong Kang(熊康), Fan Zhong-Chao(樊中朝), Han Wei-Hua(韩伟华), Yu Yu-De (俞育德), and Yu Jin-Zhong (余金中) . CMOS compatible highly efficient grating couplers with a stair-step blaze profile[J]. Chin. Phys. B, 2011, 20(7): 74212-074212.

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CMOS compatible highly efficient grating couplers with a stair-step blaze profile

CMOS compatible highly efficient grating couplers with a stair-step blaze profile

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