Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows<xref rid="cpb_27_12_124701fn1" ref-type="fn">*</xref><fn id="cpb_27_12_124701fn1"><label>*</label> <p>Project supported by the National Natural Science Foundations of China (Grant No. 11305023). The author is deeply indebted to the Dalian University of Technology for providing the authority of utilizing the COMSOL software.</p></fn>

Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows**

Project supported by the National Natural Science Foundations of China (Grant No. 11305023). The author is deeply indebted to the Dalian University of Technology for providing the authority of utilizing the COMSOL software.

Zhao Shu-Xia^†, Feng Zhao

(color online) (a) Velocity magnitudes at the inlet and the pump port of the chamber versus the flow rate at compressible flow and (b) velocity magnitude that is peaked under the inlet nozzle in the profile versus the inlet velocity at incompressible flow, at 20 mTorr and 200 W.