Subsurface defect characterization and laser-induced damage performance of fused silica optics polished with colloidal silica and ceria
He Xiang, Wang Gang, Zhao Heng, Ma Ping†,
       

The DIC images of the HF etched surfaces of samples (a) A1, (b) A2, (c) A3, (d) B1, (e) B2, and (f) B3. Different kinds of subsurface damages are marked by different symbols in each panel: red circle for polishing dot, green arrow for continuous polishing scratch, and white arrow for trailing indentation fracture.