Charge trapping behavior and its origin in Al2O3/SiC MIS system
Liu Xin-Yua), Wang Yi-Yua), Peng Zhao-Yanga), Li Cheng-Zhanb), Wu Jiab), Bai Yuna), Tang Yi-Dana), Liu Ke-Anb), Shen Hua-Jun†a)
       
XPS spectra of (a) Al 2p in 2-nm Al2O3 on 4H–SiC substrate, and (b) Si 2p in 2-nm Al2O3 on 4H–SiC substrate.