Effects of N2/O2 flow rate on the surface properties and biocompatibility of nano-structured TiO xN y thin films prepared by high vacuum magnetron sputtering*
Saleem Sehrisha),b), Ahmad R.†a), Ikhlaq Uzmaa), Ayub R.c), Wei Hong Jinb), Rui Zhen Xub), Peng Hui Lib), Abbas Khizraa), Chu Paul K.b)
       
AFM surface morphology: (a) untreated, (b) 5 sccm, (c) 10 sccm, and (d) 15 sccm oxygen flow rate.