Design of patterned sapphire substrates for GaN-based light-emitting diodes*
Wang Hai-Yana), Lin Zhi-Tinga), Han Jing-Leia), Zhong Li-Yia), Li Guo-Qianga),b)
       
SEM images of the grooved PSS: (a) straight,[ 35 ] (b) slanted,[ 27 ] and (c) V-shaped grooves.[ 27 ]