Pattern transition from nanohoneycomb to nanograss on germanium by gallium ion bombardment*
Zheng Xiao-Hua), Zhang Miaoa), Huang An-Pingb), Xiao Zhi-Songb), Paul K Chuc), Wang Xia), Di Zeng-Fenga)†
       
AFM images of the fluence-dependent surface morphology after irradition with 16 keV Ga+ and different ion doses: (a) 5×1015 cm−2, (b) 6×1015 cm−2, (c) 7×1015 cm−2, and (d) 1×1016 cm−2. Panels (e)–(h) display the profile acquired along the dashed lines in panels (a)–(d), respectively. It demonstrates the deepening of the hole and the growing of the shoulder during the ion bombardment.