Pattern transition from nanohoneycomb to nanograss on germanium by gallium ion bombardment<xref ref-type="fn" rid="cpb142943fn1">*</xref>

Pattern transition from nanohoneycomb to nanograss on germanium by gallium ion bombardment*

Zheng Xiao-Hu^a), Zhang Miao^a), Huang An-Ping^b), Xiao Zhi-Song^b), Paul K Chu^c), Wang Xi^a), Di Zeng-Feng^a)†

SEM images of nanostructures on the surface of Ge formed by 16 keV Ga⁺ bombardment with different ion doses: (a) 5×10¹⁵ cm⁻², (b) 6×10¹⁵ cm⁻², (c) 7×10¹⁵ cm⁻², and (d) 1×10¹⁶ cm⁻². All photographs are obtained with a tilt angle of 54° between electron beam and the sample.