Pattern transition from nanohoneycomb to nanograss on germanium by gallium ion bombardment<xref ref-type="fn" rid="cpb142943fn1">*</xref>

Pattern transition from nanohoneycomb to nanograss on germanium by gallium ion bombardment*

Zheng Xiao-Hu^a), Zhang Miao^a), Huang An-Ping^b), Xiao Zhi-Song^b), Paul K Chu^c), Wang Xi^a), Di Zeng-Feng^a)†

SEM images of nanostructures induced by focused Ga ion beam bombardment of Ge at different energies: (a) 5 keV, (b) 8 keV, (c) 16 keV, and (d) 30 keV. Photographs are obtained with a tilt angle of 54° between the electron beam and the samples. Inset of panel (b) depicts zoom-in image of the protuberance formation.