Optimized design and fabrication of nanosecond response electro–optic switch based on ultraviolet-curable polymers*
Zhao Xu-Lianga),b), Yue Yuan-Bina),b), Liu Tonga),b), Sun Jiana),b), Wang Xi-Bina),b),c), Sun Xiao-Qianga),b),c)†, Chen Chang-Minga),b),c), Zhang Da-Minga),b),c)
       
SEM image of the cross-sectional view of inverted-rib waveguide. The inset shows an etched groove on NOA73 cladding before the DR1/SU-8 core layer is spin-coated.