High performance silicon waveguide germanium photodetector
Li Chonga), b)† 
, Xue Chun-Laia) , Li Ya-Minga) , Li Chuan-Boa) , Cheng Bu-Wena) , Wang Qi-Minga)
, Xue Chun-Lai
High performance silicon waveguide germanium photodetector |
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Li Chong
, Xue Chun-Lai |
| (a) A schematic diagram of the device structure: a vertical pin Ge waveguide photodetector integrated on top of a 0.22-μm SOI waveguide. (b) A schematic diagram of the single-mode waveguide; (c) the top view of the device; (d) the SEM image of the WG-PD. |
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