New SOI power device with multi-region high-concentration fixed interface charge and the model of breakdown voltage*
Li Qia),b), Li Hai-Oua)†, Tang Ninga), Zhai Jiang-Huia), Song Shu-Xiangc)
       
Influence of MHFC's parameters on (a) breakdown voltage, (b) concentration of MHFC, (c) distance between two adjacent regions of fixed charge, and (d) width of fixed charge region.