Strain analysis of free-standing strained silicon-on-insulator nanomembrane*
Sun Gao-Dia),b), Dong Lin-Xia)†, Xue Zhong-Yingb), Chen Dab), Guo Qing-Leib), Mu Zhi-Qiangb)
       
SEM images of (a) the whole and (b)–(c) local regions of the suspended sSi nanomembrane.