Effect of twin boundary on nanoimprint process of bicrystal Al thin film studied by molecular dynamics simulation*
Xie Yue-Honga)†, Xu Jian-Ganga), Song Hai-Yangb)‡, Zhang Yun-Guanga)
       
The imprinting force varies with the mould displacement on single crystal and bicrystal Al thin film with different TB locations when the TB direction is perpendicular to the imprinting direction at 0.01 K. Model 7 is for the single crystal. In models 8–10, the distances between the TB and the XOY plane are 9.12 nm, 6.31 nm, and 3.51 nm, respectively.