Indium–tin oxide films obtained by DC magnetron sputtering for improved Si heterojunction solar cell applications<xref ref-type="fn" rid="cpb142922fn1">*</xref>

Indium–tin oxide films obtained by DC magnetron sputtering for improved Si heterojunction solar cell applications*

Gu Jin-Hua, Si Jia-Le, Wang Jiu-Xiu, Feng Ya-Yang, Gao Xiao-Yong, Lu Jing-Xiao

XRD patterns of ITO films deposited under different sputtering pressures.