Fabrication of Al/AlO <sub><em>x</em></sub>/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

Fabrication of Al/AlO _x/Al Josephson junctions and superconducting quantum circuits by shadow evaporation and a dynamic oxidation process

Wu Yu-Lin (吴玉林), Deng Hui (邓辉), Yu Hai-Feng (于海峰), Xue Guang-Ming (薛光明), Tian Ye (田野), Li Jie (李洁), Chen Ying-Fei (陈莺飞), Zhao Shi-Ping (赵士平), Zheng Dong-Ning (郑东宁)

Chin. Phys. B . 2013, (6): 60309 -060309 . DOI: 10.1088/1674-1056/22/6/060309