TY - Chin. Phys. B A1 - Shu-Qing Song(宋树清), Jian-Wen Xu(徐建文), Zhi-Kun Han(韩志坤), Xiao-Pei Yang(杨晓沛), Yu-Ting Sun(孙宇霆), Xiao-Han Wang(王晓晗), Shao-Xiong Li(李邵雄), Dong Lan(兰栋), Jie Zhao(赵杰), Xin-Sheng Tan(谭新生), and Yang Yu(于扬) T1 - Fabrication of microresonators by using photoresist developer as etchant Y1 - 2021-05-18 JF - Chinese Physics B JO - Chin. Phys. B SP - 60313 EP - 060313 VL - 30 IS - 6 UR - https://cpb.iphy.ac.cn N1 - 10.1088/1674-1056/abf112 ER -