TY - Chin. Phys. B A1 - Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), Jia Liu(刘佳), You-Nian Wang(王友年) T1 - Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas Y1 - 2018-04-05 JF - Chinese Physics B JO - Chin. Phys. B SP - 45202 EP - 045202 VL - 27 IS - 4 UR - https://cpb.iphy.ac.cn N1 - 10.1088/1674-1056/27/4/045202 ER -