TY - Chin. Phys. B A1 - Ji-Bin Fan(樊继斌), Xiao-Jiao Cheng(程晓姣), Hong-Xia Liu(刘红侠), Shu-Long Wang(王树龙), Li Duan(段理) T1 - Improvement of the high-κ/Ge interface thermal stability using an in-situ ozone treatment characterized by conductive atomic force microscopy Y1 - 2017-08-05 JF - Chinese Physics B JO - Chin. Phys. B SP - 87701 EP - 087701 VL - 26 IS - 8 UR - https://cpb.iphy.ac.cn N1 - 10.1088/1674-1056/26/8/087701 ER -