TY - Chin. Phys. B A1 - Ying-Shuang Liang(梁英爽), Yu-Ru Zhang(张钰如), You-Nian Wang(王友年) T1 - Influence of dielectric materials on uniformity of large-area capacitively coupled plasmas for N2/Ar discharges Y1 - 2016-10-05 JF - Chinese Physics B JO - Chin. Phys. B SP - 105206 EP - 105206 VL - 25 IS - 10 UR - https://cpb.iphy.ac.cn N1 - 10.1088/1674-1056/25/10/105206 ER -