%A Huanming Wang(王焕明), Sen Sun(孙森), Jiayin Xu(徐家胤), Xiaowei Lv(吕晓伟), Yuan Wang(汪渊), Yong Peng(彭勇), Xi Zhang(张析), Gang Xiang(向钢) %T Microstructure and ferromagnetism of heavily Mn doped SiGe thin flims %0 Journal Article %D 2020 %J Chin. Phys. B %R 10.1088/1674-1056/ab8219 %P 57504-057504 %V 29 %N 5 %U {https://cpb.iphy.ac.cn/CN/abstract/article_122457.shtml} %8 2020-05-05 %X Heavily Mn-doped SiGe thin films were grown by radio frequency magnetron sputtering and then treated by post-growth thermal annealing. Structural characterizations reveal the coexistence of Mn-diluted SiGe crystals and Mn-rich nanoclusters in the annealed films. Magnetic measurements indicate the ferromagnetic ordering of the annealed samples above room temperature . The data suggest that the ferromagnetism is probably mainly contributed by the Ge-rich nanoclusters and partially contributed by the tensile-strained Mn-diluted SiGe crystals. The results may be useful for room temperature spintronic applications based on group IV semiconductors.