%A Shuai Zhao(赵帅), Fangrong Hu(胡放荣), Xinlong Xu(徐新龙), Mingzhu Jiang(江明珠), Wentao Zhang(张文涛), Shan Yin(银珊), Wenying Jiang(姜文英) %T Electrically triggered dual-band tunable terahertz metamaterial band-pass filter based on Si3N4-VO2-Si3N4 sandwich %0 Journal Article %D 2019 %J Chin. Phys. B %R 10.1088/1674-1056/28/5/054203 %P 54203-054203 %V 28 %N 5 %U {https://cpb.iphy.ac.cn/CN/abstract/article_121571.shtml} %8 2019-05-05 %X We experimentally demonstrate an electrically triggered terahertz (THz) dual-band tunable band-pass filter based on Si3N4-VO2-Si3N4 sandwich-structured hybrid metamaterials. The insulator-metal phase transition of VO2 film is induced by the Joule thermal effect of the top metal layer. The finite-integration-time-domain (FITD) method and finite element method (FEM) are used for numerical simulations. The sample is fabricated using a surface micromachining process, and characterized by a THz time-domain-spectrometer (TDS). When the bias current is 0.225 A, the intensity modulation depths at two central frequencies of 0.56 THz and 0.91 THz are about 81.7% and 81.3%, respectively. This novel design can achieve dynamically electric-thermo-optic modulation in the THz region, and has potential applications in the fields of THz communications, imaging, sensing, and astronomy exploration.