%A Monan Liu(刘墨南), Mu-Tian Li(李木天), Han Yang(杨罕), Hong-Bo Sun(孙洪波) %T Etching-assisted femtosecond laser microfabrication %0 Journal Article %D 2018 %J Chin. Phys. B %R 10.1088/1674-1056/27/9/094212 %P 94212-094212 %V 27 %N 9 %U {https://cpb.iphy.ac.cn/CN/abstract/article_120998.shtml} %8 2018-09-05 %X

Although femtosecond laser microfabrication is one of the most promising three-dimensional (3D) fabrication techniques, it could suffer from low fabrication efficiency for structures with high 3D complexities. By using etching as a main assistant technique, the processing can be speeded up and an improved structure surface quality can be provided. However, the assistance of a single technique cannot satisfy the increasing demands of fabrication and integration of highly functional 3D microstructures. Therefore, a multi-technique-based 3D microfabrication method is required. In this paper, we briefly review the recent development on etching-assisted femtosecond laser microfabrication (EAFLM). Various processing approaches have been proposed to further strengthen the flexibilities of the EAFLM. With the use of the multi-technique-based microfabrication method, 3D microstructure arrays can be rapidly defined on planar or curved surfaces with high structure qualities.