%A Wang Ming-E (王明娥), Ma Guo-Jia (马国佳), Dong Chuang (董闯), Gong Shui-Li (巩水利) %T Preparation and characterization of thick cubic boron nitride films %0 Journal Article %D 2014 %J Chin. Phys. B %R 10.1088/1674-1056/23/6/066805 %P 66805-066805 %V 23 %N 6 %U {https://cpb.iphy.ac.cn/CN/abstract/article_116313.shtml} %8 2014-06-15 %X Cubic boron nitride (c-BN) films are prepared by the radio frequency magnetron sputtering technique. The stresses and crystallinities of the films are estimated by the Fourier transform infrared spectroscopy of c-BN samples, including the peak shifts and varieties of full widths at half maximum. The effects of the B-C-N interlayer and the two-stage deposition method on the c-BN films are investigated. Then the thick and stable c-BN films are prepared by a combination of the two methods. The properties of the interlayer and film are also characterized.