@article{Monan Liu(刘墨南):94212, author = {Monan Liu(刘墨南) and Mu-Tian Li(李木天) and Han Yang(杨罕) and Hong-Bo Sun(孙洪波)}, title = {Etching-assisted femtosecond laser microfabrication}, publisher = {Chin. Phys. B}, year = {2018}, journal = {Chinese Physics B}, volume = {27}, number = {9}, eid = {094212}, pages = {094212}, keywords = {
femtosecond laser;microfabrication;microlens array;etching
}, url = {https://cpb.iphy.ac.cn/EN/abstract/article_120998.shtml}, doi = {10.1088/1674-1056/27/9/094212} }