Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV

doi:10.1088/1674-1056/ab457a

Abstract Both long-term environmental durability and high reflectance of protected-Al mirrors are of great importance for developing the optical instruments in the vacuum ultraviolet (VUV) applications. In this paper, the dependence of spectral property and environmental durability of MgF₂ over-coated Al mirrors using a 3-step method on deposition temperature of the outermost MgF₂ layer are investigated in detail. Optics (reflectance), structure (surface morphology and crystalline), and environmental durability (humidity test) are characterized and discussed. The results show that both optical and moisture-resistant properties of MgF₂ over-coated Al mirrors are dependent on MgF₂ deposition temperature, and the optimal deposition temperature for the outermost MgF₂ layer should be between 250℃ and 300℃ for MgF₂ over-coated Al mirrors to have both reasonably high reflectance in the VUV spectral range and high moisture resistance for long lifetime applications.

Keywords: protected-Al mirrors reflectance vacuum ultraviolet MgF₂

Received: 08 April 2019
Revised: 12 September 2019
Accepted manuscript online:

PACS:	78.20.-e	(Optical properties of bulk materials and thin films)
	42.79.Fm	(Reflectors, beam splitters, and deflectors)
	78.40.-q	(Absorption and reflection spectra: visible and ultraviolet)

Fund: Project supported by the West Light Foundation of the Chinese Academy of Sciences and the National Natural Science Foundation of China (Grant No. 61805247).

Corresponding Authors: Chun Guo
E-mail: guochunyouxiang@126.com

Cite this article:

Chun Guo(郭春), Bin-Cheng Li(李斌成), Ming-Dong Kong(孔明东), Da-Wei Lin(林大伟) Effects of deposition temperature on optical properties of MgF₂ over-coated Al mirrors in the VUV 2019 Chin. Phys. B 28 117801

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Effects of deposition temperature on optical properties of MgF2 over-coated Al mirrors in the VUV

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Effects of deposition temperature on optical properties of MgF₂ over-coated Al mirrors in the VUV