Chin. Phys. B
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Chin. Phys. B  2019, Vol. 28 Issue (3): 030601    DOI: 10.1088/1674-1056/28/3/030601
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Amorphous Si critical dimension structures with direct Si lattice calibration
Ziruo Wu(吴子若)1, Yanni Cai(蔡燕妮)1, Xingrui Wang(王星睿)1, Longfei Zhang(张龙飞)1, Xiao Deng(邓晓)2, Xinbin Cheng(程鑫彬)1, Tongbao Li(李同保)1
1 School of Physics Science and Engineering, Tongji University, Shanghai 200092, China;
2 School of Aerospace Engineering and Applied Mechanics, Tongji University, Shanghai 200092, China

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