A miniaturized 2.45 GHz ECR ion source at Peking University

doi:10.1088/1674-1056/27/5/055204

Abstract

A miniaturized 2.45 GHz permanent magnet electron cyclotron resonance (PMECR) ion source, which has the ability of producing a tens-mA H⁺ beam, has been built and tested at Peking University (PKU). Its plasma chamber dimension is Φ 30 mm×40 mm and the whole size of the ion source is Φ 180 mm×130 mm. This source has a unique structure with the whole source body embedded into the extraction system. It can be operated in both continuous wave (CW) mode and pulse mode. In the CW mode, more than 20 mA hydrogen ion beam at 40 kV can be obtained with the microwave power of 180 W and about 1 mA hydrogen ion beam is produced with a microwave power of 10 W. In the pulse mode, more than 50 mA hydrogen ion beam with a duty factor of 10% can be extracted when the peak microwave power is 1800 W.

Keywords: miniaturized ECR ion source hydrogen plasma continuous wave (CW) beam pulse beam

Received: 12 January 2018
Revised: 10 March 2018
Accepted manuscript online:

PACS:	52.50.Sw	(Plasma heating by microwaves; ECR, LH, collisional heating)
	52.50.Dg	(Plasma sources)
	52.50.-b	(Plasma production and heating)
	52.59.-f	(Intense particle beams and radiation sources)

Fund:

Project supported by the National Basic Research Program of China (Grant No.2014CB845502) and the National Natural Science Foundation of China (Grant No.11575013).

Corresponding Authors: Shi-Xiang Peng
E-mail: sxpeng@pku.edu.cn

Cite this article:

Jia-Mei Wen(温佳美), Shi-Xiang Peng(彭士香), Hai-Tao Ren(任海涛), Tao Zhang(张滔), Jing-Feng Zhang(张景丰), Wen-Bin Wu(武文斌), Jiang Sun(孙江), Zhi-Yu Guo(郭之虞), Jia-Er Chen(陈佳洱) A miniaturized 2.45 GHz ECR ion source at Peking University 2018 Chin. Phys. B 27 055204

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A miniaturized 2.45 GHz ECR ion source at Peking University

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