Chin. Phys. B
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Chin. Phys. B  2018, Vol. 27 Issue (4): 045202    DOI: 10.1088/1674-1056/27/4/045202
PHYSICS OF GASES, PLASMAS, AND ELECTRIC DISCHARGES Current Issue| Next Issue| Archive| Adv Search |
Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas
Chan Xue(薛婵)1, Fei Gao(高飞)1, Yong-Xin Liu(刘永新)1, Jia Liu(刘佳)2, You-Nian Wang(王友年)1
1. Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams(Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China;
2. Shanghai Institute of Space Propulsion, Shanghai 201112, China

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