Chin. Phys. B
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Chin. Phys. B  2017, Vol. 26 Issue (10): 108201    DOI: 10.1088/1674-1056/26/10/108201
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Angle-resolved x-ray photoelectron spectroscopy study of GeOx growth by plasma post-oxidation
Zhiqian Zhao(赵治乾)1, Jing Zhang(张静)1, Xiaolei Wang(王晓磊)2,3, Shuhua Wei(魏淑华)1, Chao Zhao(赵超)2,3, Wenwu Wang(王文武)2,3
1. Microelectronics Department, North China University of Technology, Beijing 100041, China;
2. Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China;
3. School of Microelectronics, University of Chinese Academy of Sciences, Beijing 100049, China

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