Chin. Phys. B
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Chin. Phys. B  2017, Vol. 26 Issue (9): 098103    DOI: 10.1088/1674-1056/26/9/098103
INTERDISCIPLINARY PHYSICS AND RELATED AREAS OF SCIENCE AND TECHNOLOGY Current Issue| Next Issue| Archive| Adv Search |
Crystalline silicon surface passivation investigated by thermal atomic-layer-deposited aluminum oxide
Cai-Xia Hou(侯彩霞)1,2, Xin-He Zheng(郑新和)1, Rui Jia(贾锐)2, Ke Tao(陶科)2, San-Jie Liu(刘三姐)1, Shuai Jiang(姜帅)2, Peng-Fei Zhang(张鹏飞)2, Heng-Chao Sun(孙恒超)2, Yong-Tao Li(李永涛)2
1 Department of Physics, University of Science and Technology Beijing, Beijing 100083, China;
2 Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

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